Ultra-thin Chip Technology and Applications
Springer; 1st Edition. edition (November 19, 2010) | ISBN: 1441972757 | 538 pages | PDF | 15 MB
Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.